Used NORDSON MARCH AP-1000 #293798171 for sale

NORDSON MARCH AP-1000 is an advanced etcher/asher designed for use in wafer processing. It is a desktop-based equipment featuring a load port at the front and an expandable multi-chamber design, with up to 8 chambers. This system features a high aspect ratio and high selectivity for high yield production of advanced devices with critical dimensions such as memory and display devices. NORDSON MARCH AP 1000 features a 1000 watt HF Generator for optimized plasma production. It can also generate high quality plasma with an oxygen, etchoxy, chlorine and argon gases. In addition, the unit also features a pulsed operation for further process optimization. The generator has a frequency of 13.56 MHz and can handle wafer sizes up to 8〞 in diameter. The machine also features a comprehensive suite of process monitoring and control options to ensure excellent repeatability and process optimization. The tool software is remotely programmable and can easily be customized, while the bundled PC front-end application provides users with an easy and intuitive process control interface. The asset also includes an open-platform transfer model for easy setup and compatibility with a wide variety of carriers. AP-1000 is a versatile etcher/asher that can deliver excellent throughput and high-quality results. The equipment is built to a high-quality standard and is easy to maintain and clean for extended use. The system offers an excellent return on investment due to its ability to process a wide range of materials with high-quality results. Additionally, the unit is easy to install and set up, so users can quickly benefit from its capabilities.