Used NORDSON MARCH AP-1000 #293829677 for sale

NORDSON MARCH AP-1000 is an advanced etcher / asher equipment that offers outstanding precision and reliability for specialized etching and ashing applications. NORDSON MARCH AP 1000 features a unique design that allows users to quickly and efficiently pattern substrates with high accuracy and repeatability. This etcher / asher system is programmed using an intuitive graphical user interface, making it easy to control various etching and ashing parameters. AP-1000 has a 500mm x 500mm substrate size, with a maximum load of 50kg. It is equipped with a gas mixing capability that enables both mixed gas and open-bath processes, and it can over-etch by up to 0.5 µm. It also features a remote loading / unloading unit for easy substrate handling, and it provides excellent repeatability up to ± real-time precision. AP 1000 comes with a multi-frequency head that enables users to change the frequency of process over-etching, gap cleaning, and over-etching. The multi-frequency head also enables pattern control of etching and ashing patterns, as well as the ability to etch high aspect ratio profiles. NORDSON MARCH AP-1000 also features pattern control of segment shapes, with advanced overwrite controls, along with a programmable threshold switching algorithm for in-situ gas adjustment. It also has a direct drive head configuration that offers improved process repeatability and precision. NORDSON MARCH AP 1000 is designed with a powerful analytical and diagnostic software package that provides detailed process information, with an automated data collection feature. Its closed-loop intelligent gas control machine enables a fast reaction to parameter input and process conditions. AP-1000 also utilizes a universal drawer configuration that enables multiple substrate chips to be used at the same time, which offers great flexibility for various production configurations. AP 1000 offers a comprehensive range of process options that make it an ideal choice for a variety of etching and ashing applications. It offers outstanding accuracy and performance, with repeatability, and outstanding precision with up to ± real-time precision. NORDSON MARCH AP-1000 has an intuitive graphical user interface for ease of operation and control, combined with sophisticated analytical and diagnostic software for detailed process information.