Used NORDSON MARCH AP-1000 #9156324 for sale
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ID: 9156324
Vintage: 2012
Plasma cleaning system
PLC Controller with touch screen
Graphical interface
Real time process representation
Part carriers either direct or downstream plasma mode
Automatic impedance RF generator: 13.56 MHz
Proprietary software control system
Production data for statistical process control
Effective footprint:
Clearances:
Right, Left: 153 mm (6 in)
Front: 680 mm (26.8 in)
Back: 483 mm (19 in) Minimum
Chamber:
Dimensions: 457W x 610D x 457H mm (18W x 24D x 18H in)
Volume: (127) Liters (7776 in³)
Variable electrode configurations:
Direct
Downstream
HTP Wide
HTP Narrow
(14) Shelf positions
Shelf pitch:
25.4mm (1 in) for 600W
50.8mm (2 in) for 1000 W
Electrodes:
Powered electrode dimensions :
349W x 425D mm (13.74 W x 16.73D in)
Ground (perf.) electrode dimensions:
384W x 425D mm (15.1W x 16.73D in)
Floating shelf dimensions:
349W x 425D mm (13.74W x 16.73D in)
RF Power:
Standard wattage: 600W
Frequency: 13.56 MHz
Gas control:
(4) MFCs
Remote interface:
Software controls:
Plasma link
Process link
Vacuum pump:
Standard vacuum pump:
50 CFM (50 / 60Hz)
Wet pump with oil mist eliminator
Facilities:
Power supply
220V, 25A, 50/60 Hz, 3 phase, 8AWG, (4) Wires
380V, 25A, 50/60Hz, 3 phase, 8 AWG, (5) Wires
Process gas fitting size and type:
OD Swagelok tube: 0.25-in
Purge gas fitting size and type:
OD Swagelok tube: 0.25-in
Pneumatic valves fitting size and type:
OD Swagelok tube: 0.25-in
Purity:
Industrial grade nitrogen or CDA
Industrial grade or better
Pressure and flow:
Regulated from 0.69bar (10PSI) min. to 1bar (15PSI) max
Regulated from 2bar (30PSI) min. to 5.5bar (80PSI) max
Regulated from 3.4bar (50PSI) min. to 5.5bar (80PSI) max
CDA
Oil free
Dewpoint: <=7°C /45°F
Particulate size: <5 Micron
Exhaust:
OD Pipe flange: 38mm (1.5 in.)
Compliance:
SEMI: S2, S8, E10
International: CE Marked
Ancillary equipment:
Gas generators
Nitrogen
Hydrogen
Facilities modules:
Oil filtration
Chiller
Scrubber
Currently installed
2012 vintage.
The Nordsom March NORDSON MARCH AP-1000 is a precision etcher / asher that is designed for high throughput materials processing. NORDSON MARCH AP 1000 utilizes physical vapor deposition (PVD) techniques to deposit materials to the surface of a substrate at a high rate of accuracy. This process is ideal for creating circuit patterns, depositing protective metallization layers, and providing a range of other fabrication techniques. AP-1000 is capable of supporting a wide range of substrates, including ceramics, electroplated base materials, quartz, semiconductor wafers and a variety of other materials. AP 1000 features an enclosed chamber for the deposition process and an optional stainless steel vent for evacuation of hazardous gases. The enclosed chamber ensures that the deposition process is shielded, providing an effective means of controlling the process pressure and avoiding contamination. The chamber is equipped with an adjustable-pressure flow control valve and adjustable temperature and pressure sensors. NORDSON MARCH AP-1000 is equipped with a range of tools for etching and ashing, including milling capability, wire feeders and a resistive-etching device. The Nordsom March NORDSON MARCH AP 1000 offers the best in precision etching and ashing technology. The system is designed for automated, repeatable, and reproducible high-rate deposition processes, and is optimized by a powerful, ergonomic control system. The software provides for easy programming of many processes, with user-friendly menus and graphical display of the process parameters. The software also features an intuitive graphical user interface for setting up complex deposition recipes. The Nordsom March AP-1000 is capable of supporting a wide variety of substrates and can be customized to meet the needs of specific applications. Its enclosed chamber design ensures a safe and controlled deposition process, and its adjustable-pressure flow control valve helps maintain accuracy and repeatability. In addition, AP 1000 is equipped with a range of tools for performing etching and ashing operations, and its powerful yet accessible control system makes it easy to use even for novice users. All told, the Nordsom March NORDSON MARCH AP-1000 is the perfect tool for precise materials processing.
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