Used NORDSON / MARCH AP-1500 #293763751 for sale

ID: 293763751
Vintage: 2017
Plasma system Chamber maximum volume: 442 liters (27,000 in³) Electrode shelfs: (2) Powered (2) Ground RF Power: Standard wattage: 2000 W Frequency: 40 KHz Gas control: (4) MFCs Control and interface: Software control: EPC with PC-Based touch screen interface Remote interface: SMEMA, SECS/GEM Vacuum pump: Dry pump: 65 cfm (50/60 Hz) Electrodes: Variable electrode configurations: Direct Downstream Process gas fitting size and type: 6.35 mm (0.25 in.) OD SWAGELOK Tube Process gas purity: Industrial grade or better Process gas pressure: 0.69 bar (10 psi) min. to 1 bar (15 psi) max Purge gas fitting size and type: 6.35 mm (0.25 in.) OD SWAGELOK Tube Purge gas purity: Industrial grade N2/CDA Purge gas pressure: 2 bar (30 psi) min to 5.5 bar (80 psi) max Pneumatic valves fitting size and type: 6.35 mm (0.25 in.) OD SWAGELOK Tube Pneumatic gas purity: CDA Oil free Dewpoint: ≤7°C (45°F) Particulate size: <5μm Pneumatic gas pressure: 3.45 bar (50 psi) min to 5.5 bar (80 psi) max Exhaust: 38 mm (1.5 in.) OD Pipe flange SEMI: E10, S2/S8 Gas generators: Nitrogen, hydrogen. Chiller Scrubber. 2017 vintage.
NORDSON / MARCH AP-1500 is a leading-edge etcher/asher equipment utilized for advanced surface treatment processes in the semiconductor and microelectronics industries. With its cutting-edge technology and precision engineering, MARCH AP-1500 is designed to deliver exceptional performance in etching, ashing, and surface modification applications. This versatile tool offers a wide range of capabilities to meet the evolving demands of high-tech manufacturing processes. NORDSON AP-1500 is equipped with advanced plasma processing technology that enables precise control over plasma parameters such as gas flow rate, power density, and process time. This level of control allows users to tailor the etching/ashing process to achieve the desired surface characteristics and specifications with high repeatability and uniformity. The system's plasma source generates a high-density plasma that is essential for achieving efficient and uniform processing across the substrate surface. One of the key features of AP-1500 is its proprietary RF power delivery unit, which ensures stable and reliable plasma excitation for consistent performance. The RF power supply is optimized to deliver high power levels while maintaining excellent stability and uptime, crucial for achieving consistent processing results in a production environment. The machine's power distribution and matching network are designed to maximize power transfer efficiency and minimize losses, leading to improved process repeatability and reduced operating costs. NORDSON / MARCH AP-1500 is equipped with a state-of-the-art process chamber that is engineered for high-throughput processing of substrates with varying sizes and materials. The chamber features a user-friendly design with easy access for maintenance and cleaning operations, allowing for efficient tool operation and minimal downtime. The tool also incorporates advanced gas delivery and mixing capabilities to ensure precise control over the chemistry of the plasma process, enabling a wide range of etching and ashing applications. In addition to its robust hardware design, MARCH AP-1500 is supported by a comprehensive software interface that offers intuitive process control and real-time monitoring capabilities. The asset's user-friendly interface allows operators to easily set up and execute complex process recipes, adjust process parameters on-the-fly, and monitor critical model diagnostics in real-time. The software also supports data logging and analysis functions, enabling users to track process performance, optimize recipes, and maintain consistent process control over time. Overall, NORDSON AP-1500 etcher/asher equipment sets a new standard for advanced plasma processing technology in the semiconductor and microelectronics industries. With its cutting-edge features, precision engineering, and user-friendly interface, AP-1500 offers a powerful solution for high-tech manufacturing applications requiring exceptional process control, reliability, and performance. Whether used for research and development or high-volume production, NORDSON / MARCH AP-1500 is designed to meet the demanding requirements of modern semiconductor processing with unmatched precision and efficiency.
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