Used NORDSON MARCH AP-300 #293652419 for sale

NORDSON MARCH AP-300 Etcher/Asher is an efficient and fast-acting benchtop vapor etch/ash equipment for etching and ashing semiconductor wafers, MEMS, and other substrate materials such as Si, SiO2, and SiN. The MARCH NORDSON MARCH AP 300 etcher/asher is an ideal machine for processing off-site research and prototyping samples. It combines the efficiency of an oven etch/ash system with the versatility of a wet etchant. The MARCH AP-300 Etcher/Asher is built on NORDSON MARCH E100 platform and is perfect for research and development organizations because of the wide variety of processes the unit offers. The MARCH AP 300 can process samples up to 200mm in diameter by using a stainless steel bell jar enclosure, which is capable of generating up to 29.5"Hg of vacuum pressure. This provides uniform and repeatable etching and ashing of samples without the need for load locks or bake stations. A single cyclic process controller is used to control the chamber temperature and pressure. The controller, with its intuitive software interface, uses the latest microprocessor technology, allowing for customizable and repeatable processes. The MARCH NORDSON MARCH AP-300 Etcher/Asher is also equipped with safety features such as operator interlock, emergency shut-off, bond breaker, and vacuum monitoring. For efficient ashing, the MARCH NORDSON MARCH AP 300 uses a flapping gate valve, which allows for quick and easy switching between front-side and back-side ash. The integrated wafer carrier and chuck with level support machine guarantees a secure etch environment for consistent results and repeatability. The MARCH AP-300 comes with a wide variety of recipe editing options. It is designed to allow users to create process recipes by setting pressure, time, temperature, and quantity of flow using pre-defined phase parameters. This means that users can quickly and accurately tailor their processes to their demands. The MARCH AP 300 also comes with a patented NORDSON MARCH Inorganic Oxide Removal (M-IOR) tool. This asset wastes no time in depositing wetting layers - ensuring perfect oxide adhesion and etching. Overall, NORDSON MARCH AP-300 Etcher/Asher is an advanced, bench-top etching and ashing model that offers unmatched precision and consistency in semiconductor, MEMS, and other substrate processing. Its highly customizable and repeatable processes make it the ideal equipment for research and development organizations.