Used NORDSON / MARCH AP-600 #9182457 for sale

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ID: 9182457
Vintage: 2015
Plasma cleaning machine 2015 vintage.
NORDSON / MARCH AP-600 is a compact, high quality etching and ashing equipment designed to take productivity and process accuracy to the highest degree. Its intuitive design allows for extremely fast changeover between different process steps, making it ideal for a wide range of wafer processing requirements. The advanced, flexible design of MARCH AP-600 makes it suitable for a wide variety of etching and ashing applications, from integrated circuit fabrication to medical device research and development. NORDSON AP-600 is designed with the highest level of precision and engineering, and is capable of achieving consistent and repeatable results. The system is equipped with an advanced, high-resolution user interface to quickly guide operators through the process, as well as heated substrates to ensure high etch rates and uniform particle distribution. Additionally, the unit features a programmable ramping speed machine, allowing users to vary etch rates to achieve optimal results without sacrificing time or accuracy. AP-600 also features an integrated Dynamic Leveling Control (DLC) feature, which enables users to control particle flow and distribution independently, creating perfect etches on fine line patterns. The configuration of NORDSON / MARCH AP-600 also allows users to program the tilt of the downstream platen, allowing for more precise material control, and a dual-chamber etch configuration for flexibility when performing different process steps. Additionally, the tool is equipped with metal etch and ashing capabilities, as well as semiautomatic substrate loading. MARCH AP-600 is designed with two separate plasma sources, one for etching and one for ashing, allowing users to conduct two different processes at the same time. The plasma sources are automatically tuned through an onboard gas feedback asset, ensuring an optimal plasma composition for each application. The model also comes equipped with a vacuum evacua tor to exhaust etch and ashing byproducts, and a high accuracy digital mass flow controller integrated into the vacuum line. NORDSON AP-600 is a powerful, cost effective, and reliable etching and ashing equipment that allows users to achieve precise, consistent results. The system is backed by superior customer service and support from MARCH team, providing users with peace of mind and added value.
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