Used NORDSON / MARCH FasTRAK #293639143 for sale

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ID: 293639143
Vintage: 2018
Plasma cleaner 2018 vintage.
NORDSON / MARCH FasTRAK is an advanced etching and ashing equipment designed to quickly and accurately etch and ashing substrates without the need for operator intervention. The system is a fully-automated, self-contained unit that offers temperature and pressure control, precision pattern control, and complete process enclosure. The unit is ideally suited for a variety of etching and ashing applications, including Micromachining, Semiconductor Manufacturing, Medical Device Manufacturing, and more. MARCH FasTRAK etcher/asher machine offers a simple, yet powerful platform to quickly and accurately process substrates. The tool is designed to reduce the time required to etch and ashing substrates, resulting in higher product yields, improved process reproducibility, and greater process control. The asset includes an innovative and easy-to-use user interface, with a graphical user interface (GUI) that simplifies setup and recipe management. The model utilizes powerful and advanced etching/ashing technology to process substrates with precision and accuracy. The equipment features three programmable etching/ashering facilities, including dry etching, wet etching, and plasma etching, along with optional plasma cleaning. The system also offers a variety of advanced etching capabilities and processes, including Deep Reactive Ion Etching (DRIE), Inductively Coupled Plasma Etching (ICP), Chemical Mechanical Polishing (CMP), and many more. NORDSON FasTRAK etcher/asher unit is designed to provide an efficient and reproducible etching/ashing process. The machine is ideal for a variety of applications, including contact-less lithography, advanced optical device fabrication, and photomask fabrication, among others. The tool allows users to configure the parameters within each facility, ensuring that the desired etching/ashing results are achieved. In addition, the asset offers the ability to save and recall process recipes, allowing users to quickly recall parameter sets for different substrates. FasTRAK etcher/asher model also features advanced safety features, including an interlock equipment for personnel protection and a scrubber for emission control. The system is designed with a Class 1, Division 1 enclosure to ensure that personnel remains safe during the etching/ashing process. The scrubber is capable of controlling particle types, size, and concentration, ensuring that any hazardous particles released during the process are controlled and released to a safe level. Overall, NORDSON / MARCH FasTRAK etcher/asher unit is a powerful and advanced etching and ashing machine designed to quickly and accurately etch and ashing substrates without the need for operator intervention. The tool offers a user-friendly interface, advanced capabilities, and powerful safety features, making it ideal for a variety of etching and ashing applications.
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