Used NORDSON MARCH FlexTRAK #9299708 for sale
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NORDSON MARCH FlexTRAK is an advanced etching, or etching/washing, platform designed for research, development, and testing of new etching, cleaning, and washing processes. It is capable of handling a variety of process chemistries for precise adjustment and control over etch depth, etch time, etch contamination, etch defectivity, and etch rates. The MARCH FlexTRAK controls all etching parameters including etch reactor pressurization, wafer preheat system, plasma gas flow, power delivery to the electrodes, adjustable RF wattage, and adjustable etch solution volume. NORDSON MARCH FlexTRAK platform can be used to create application-specific recipes that take advantage of precise control of all parameters for optimal etching results. FlexTRAK supports a wide variety of process chemistries in its innovative, easy-to-use design. The etch process chemistries are fully modular, meaning that the user can add or remove chemistries during the etching process. This is especially useful when developing wide variety of process recipes, as the user can easily switch between different chemistries. NORDSON MARCH FlexTRAK consists of a single-chamber vacuum etcher/washer, a number of integrated process chambers, and a digital touchscreen control panel that controls the entire etching, cleaning, and drying process. The etching chamber is powered by a high frequency power supply, allowing for precise control over the etch rate and etch depth. The etch chamber also contains a built-in moisture sensor to ensure uniform etching across the surface of the substrate. The integrated process chambers offer an adjustable mix of process chemistries to develop new recipes, allow for cleaning and post-etching processes, and provide an optimized etching environment. The built-in sensors and control systems ensure an optimal etching profile. Finally, FlexTRAK features a powerful user-interface to manage all etching parameters. The control panel allows for adjustment of all etching parameters, including etch depths, etch times, temperature, gas flow, and RF energy. It also features an advanced modeling and data collection feature to enable accurate development of unique etching processes. Additionally, the MARCH software suite makes it easy to integrate etching and cleaning processes within a single application, streamlining process development. In sum, NORDSON MARCH FlexTRAK is a powerful etching, cleaning, and washing platform that offers user-friendly controls, a wide range of process chemistries, adjustable etch parameters, and an array of integrated sensors and diagnostics for precise control over etching processes. Its easy-to-use controls and powerful features make it an ideal platform for a variety of etching applications.
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