Used NORDSON / MARCH MaxVIA #9314778 for sale

NORDSON / MARCH MaxVIA
ID: 9314778
Vintage: 2017
Plasma treatment systems (15) Processing cells Control system: PLC, Touch screen interface RF Power: 10kW 2017 vintage.
NORDSON / MARCH MaxVIA is an advanced, automatic Etcher/Asher used for high volume, precision etching and ashing of wafers and substrates. MARCH MaxVIA is designed to provide quick and consistent results while processing a variety of materials. The process begins with loading the wafer onto NORDSON MaxVIA's user-friendly transfer station, which securely positions and holds the wafer for process. MaxVIA is equipped with several safety features, including a wafer handling systems, anti-bounce suspension, a wafer centering unit, and an inert gas purge designed to provide safe operation and protect the environment. NORDSON / MARCH MaxVIA features two independent power supplies, each capable of providing up to 400 Watts of power. This allows for the achievement of ideal process temperatures, ensuring consistent results across each process batch. The etcher/asher is also designed with a sophisticated process control system, which can be used to generate program cycle times and process parameters such as temperature, pressure, and gas flow rates. The engineer can customize the recipe for each process, setting up the etch and ashing rates, temperatures, gas mixtures, and other parameters to create the desired result. MARCH MaxVIA also offers two independently controlled process chambers, which facilitates simultaneous etch and ashing of wafers. NORDSON MaxVIA's precise and repeatable results, in addition to its low maintenance costs, make it an ideal solution for high-volume etching and ashing applications. The operator can also access the process chamber remotely via a PC or smartphone, allowing the user to monitor and adjust recipes from any location. Overall, MaxVIA is a powerful, yet user-friendly, Etcher/Asher ideal for a variety of applications. Its safety features help ensure a safe operation environment, while its programmable parameters and multiple chambers further increase its efficiency and precision.
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