Used NORDSON / MARCH MaxVIA #9397009 for sale

NORDSON / MARCH MaxVIA is an advanced automated etcher and asher equipment designed for semiconductor packaging, micro-electronics and related industries. It uses advanced plasma etching to produce precise features in thin film substrates. MARCH MaxVIA is an extended version of Nordsom's well-known MaxFlex Plasma System, providing increased etch rates and superior feature accuracy. NORDSON MaxVIA features a high-throughput, high-precision plasma etching unit designed for production use. It is capable of etching multiple layers from a variety of materials, including photoresist, SiO2, Si3N4 and Quartz. Its advanced plasma source consists of two flat-panel plasma sources, providing a controllable, focused, deep-etching plasma for fine structures and circuits with high-throughput and high-etch rates. The machine includes several intelligent design features, such as an advanced feedback control tool which ensures high etch uniformity and repeatability. It has integrated optical scanning capabilities, which greatly reduce misalignment between sequences, allowing precise feature registration and pattern accuracy. MaxVIA also features advanced safety systems, such as a complete, integrated, stainless steel vacuum chamber with static cleanliness sensor and a strong vacuum lock with electro-mechanical interlocks. This ensures operator safety as well as providing a clean contamination-free substrate processing environment. NORDSON / MARCH MaxVIA can be operated in either manual or fully automatic mode, allowing users to choose the best processing configuration for their production needs. It also has an optional robotic pre-alignment asset, which allows multiple substrates to be loaded into the model for precise placement relative to the source and target location. MARCH MaxVIA is a powerful, reliable, and flexible solution for advanced etching and ashing systems needed for production of high-precision structures, features, and circuits in the micro-electronics and semiconductor packaging industries. Its integrated safety systems, automatic control features, and ergonomic design provide an efficient and safe production environment with plenty of benefits to the user.