Used NOVELLUS Gamma 2130 #293627326 for sale

NOVELLUS Gamma 2130 is an etcher/asher designed for high productivity applications. The equipment's unique process technology, design and features enable it to provide low-cost, high-performance etching and ashing operations. Gamma 2130 is ideal for both advanced technology node process development and cost effective, manufacturing production and maintenance. NOVELLUS Gamma 2130 is built with a compact footprint, which makes it suitable for a variety of application needs and throughput requirements. The process chamber can handle up to eight wafers, with full control over recipe parameters, allowing for process repeatability. The turret is equipped with one quartz showerhead and one electron-beam showerhead, which allows for a wide range of process options. The system is driven by a powerful process controller, which offers a stable process environment and features an intuitive graphical user interface. Gamma 2130 is equipped with an advanced multi-pulse power generator. This power generator automatically adjusts and compensates for the heat load in the process chamber, providing a consistent process window. The power generator also features an advanced process control function, which automatically maintains optimal etching and ashing conditions. The advanced process controller also helps ensure stable process parameters, including etching and ashing times, pressure, and temperature. NOVELLUS Gamma 2130 is compatible with a wide range of process chemistries and is capable of working with single or multiwafer dices. In addition, the unit is designed to be easily upgraded with additional chambers and various other options. Gamma 2130 also supports online and offline monitoring and control of all process functions. Overall, NOVELLUS Gamma 2130 provides an efficient, high-performance etching and ashing solution for a variety of applications. The machine's robust process control and accuracy make it an ideal choice for both development and production processes. It also offers stability, repeatability, and reliability for producing uniform parts with high-quality surface finishes.