Used NOVELLUS Gamma 2130 #293773386 for sale

NOVELLUS Gamma 2130 is an etcher/asher used for plasma-based processing of semiconductor wafers. The machine is capable of advanced etching and ashing processes, thanks to its unique ion plasma source and integral Endura® Etch Control. This equipment allows for fast and precise wafer etching in order to create small, intricate features on the wafer. Gamma 2130 has a plasma source that is capable of generating high-density ion plasma with up to 5kW RF power. This allows for robust in-situ etching/ashing process control and exceptional etch uniformity. The integrated Endura® Etch Control system optimizes the etching process, ensuring maximum uniformity of etched patterns. NOVELLUS Gamma 2130 is designed for easy and flexible wafer transport, which results in minimal chamber cooldown and rapid cycle times. Its innovative shuttle loading unit allows for quick loading and unloading of the etch chamber, with minimal downtime due to its automatic door and position sensors. In addition, the chamber is equipped with the Multi-Tower™ towers which can be adjusted horizontally and vertically according to the topography of the wafer. Gamma 2130 is a stand-alone, integrated etching/ashing machine capable of etching up to 200mm wafers. Its chamber is equipped with a grid-less bottom and optimized source distribution that ensures excellent parallel processing, thus resulting in high productivity and etching of small features. Additionally, the machine is easy to use, thanks to its intuitive Graphical User Interface and the embedded Endura® Etch Control tool. NOVELLUS Gamma 2130 is therefore an ideal etching/ashing asset for a wide range of advanced semiconductor processes such as MEMS, TSV, Through Silicon Vias and others. With its reliable operation and high throughput, Gamma 2130 can be used in production and development in high-volume semiconductor fabrication.