Used NOVELLUS Gamma 2130 #293820192 for sale

NOVELLUS Gamma 2130 is an etching and asher equipment that operates on a process sequence of Oxide, Nitride, Metals, and Polysilicon. It utilizes a variety of etching processes, including dry etching and wet etching, to enable precise control of processes and material removal. The system enables the repeatable production of high-quality, high-performance devices, including analog, digital, and mixed-signal electronics. Gamma 2130 utilizes an advanced substrate clamping unit that ensures a high-precision, repeatable registration for processing wafer and substrate materials. This feature ensures that etching and ashing processes are carried out accurately, without damaging the substrate material. NOVELLUS Gamma 2130 also utilizes additional automated setup features and repeatability checks to ensure the production of consistently high-quality results. The machine's process chambers are operated using a high-precision gas delivery tool and are designed to enable oxidation, nitride, and metal etching, as well as chemical mechanical polishing (CMP) processes. It also features an advanced programmable etch controller that enables precise control over processes, assisting in the production of thin-film and high-precision device geometries. In addition to these features, Gamma 2130 is capable of simultaneous multi-etches, enabling the fast processing of multiple wafers. This capability helps to speed up production and reduce downtime. The etching asset also includes several safety features, such as over-temperature detection and leak detection, to protect the equipment and personnel from potentially hazardous situations. NOVELLUS Gamma 2130 is an advanced etcher and asher model that is highly capable of providing precise control over operations. It is designed to enable the fast, repeatable, and reliable production of thin-film and high-precision devices. With its wide variety of etching processes, automated setup capabilities, and safety features, Gamma 2130 provides a reliable platform for etching and ashing applications.