Used NOVELLUS Gamma 2130 #9260075 for sale

NOVELLUS Gamma 2130 is an advanced etch/ash tool that provides superior process capability and reliability for a variety of etch/ash applications. It is optimized to meet the needs of CMOS fabrication processes, offering superior feature control, process uniformity and cycle time for high volume applications. Gamma 2130 features an advanced three-beam design that provides uniform four-sided wall profiles for high aspect ratio processing. It utilizes a unique ultra-fast interferometer that maintains precise beam placement for stable etch/ash performance. The tool also includes adjustable slit opening for process tuning across a wide range of wafer sizes, and an advanced dry etch process for reliable backside protection. NOVELLUS Gamma 2130 has a high throughput architecture that enables unattended operation for up to 24 hours. It utilizes comprehensive robotic handling for seamless integration with other machines in the factory. Built-in sensors and feedback-control loops ensure continual performance monitoring and stability verification. The system also comes equipped with advanced diagnostics technology. It has an enhanced console display that provides real-time monitoring of process parameters and system performance. In addition, Gamma 2130 provides non-uniform input data for improved recipes and model predictions. NOVELLUS Gamma 2130 is a powerful etch/ash tool designed to meet the demands of the most demanding CMOS fabrication processes. It offers exceptional feature control, greater process uniformity, and shorter cycle times. The machine's advanced three-beam design and sophisticated diagnostics make it a powerful and reliable tool for a variety of etch/ash applications.