Used NOVELLUS Gamma 2130 #9282119 for sale

NOVELLUS Gamma 2130 is a high-performance etcher / asher designed for the etching and ashing of various substrates, including metals, ceramics, quartz, and glass. Gamma 2130 utilizes advanced electron beam evaporation technology coupled with cryogenic cooling technology to create etch and ash profiles with excellent resolution, uniformity, and repeatability. NOVELLUS Gamma 2130 features a powerful, computer-controlled deposition equipment, which can achieve high-rate deposition with minimal thermal drift. The integrated computer system allows for automated programming and control of the etching and ashing processes while monitoring for temperature, power, and pressure variations. Gamma 2130 allows flexible recipe control with high reproducibility, enabling precise dosage and uniform composition across substrates with low thermal drift. NOVELLUS Gamma 2130 is designed with a sealed chamber, providing enhanced safety, process repeatability, and accuracy. It is capable of precise control of etch/ash/deposition parameters, with each process independently controlled to ensure constant delivery of material. The sealed chamber also allows a wide range of gases to be admitted at various pressures for optimal process control and enhanced etch/ash profile through improved uniformity. Gamma 2130 features a high load capacity with a multi-zone temperature unit. This allows for better uniformity and better thermal control over the large etch area and improved process repeatability and accuracy. It also significantly reduces process time due to the higher rate of material deposition. NOVELLUS Gamma 2130 delivers exceptional performance and repeatability, with very low particle generation for optimal topography control. It is designed to be easily integrated into production lines and automated systems, allowing for rapid and consistent substrate preparation. Its advanced control machine provides an efficient, high-precision etching and ashing process, resulting in superior quality etch and ash results.