Used NOVELLUS Vector Express #9203793 for sale

NOVELLUS Vector Express is a high-speed etching and ashing equipment designed for advanced process flexibility and performance in semiconductor device manufacturing. It combines a variety of proprietary technologies to enable the creation of a broad range of integrated circuits (ICs) in a single processing chamber. This system offers superior throughput rates, controlled cost of ownership and optimal space efficiency. Vector Express boasts an innovative, self-contained design that enables it to be installed and set up with minimal effort and operational disruption. NOVELLUS Vector Express is used in a wide variety of etching and ashing processes. Depending on the complexity of the application, the unit can etch a single layer of a device or multiple layers in multi-step processing. It can also be used for a variety of wafer cleaning and back filling tasks. The machine is designed with two main components: the main processing chamber and the thermal-transfer chamber. The latter is a mini-furnace that is used to generate radicals for etching, ashing and annealing processes. To ensure maximum productivity, Vector Express utilizes a sophisticated roller-shutter door, allowing rapid loading and unloading of the wafers without interrupting the processing cycle. The processor also has a intuitive user-interface, with convenient touchscreen-accessible features and parameters. The tool can store up to 8 recipes, allowing for quick and easy switching between processes. A library of commonly used gas compositions is also integrated, allowing users to access frequently used gas mixtures quickly. NOVELLUS Vector Express is equipped with both a resistive and inductive plasma source, allowing the asset to achieve high-precision and high-throughput etching and ashing. It also uses low frequency plasma to reduce particle generation while ensuring exceptional etch uniformity. The model's robust design works with a wide range of process gases to enable optimal integration into existing production lines. Finally, Vector Express offers excellent process monitoring and control, allowing for real-time adjustments and optimized processing conditions. In summary, NOVELLUS Vector Express is an advanced etcher and asher that offers superior throughput rates, efficient space consumption, excellent control features and an intuitive user-interface. With its robust and innovative design, it is an ideal choice for chip manufacturers looking to maximize their production capabilities.