Used NOVELLUS Vector Express #9203794 for sale

NOVELLUS Vector Express is an innovative, high-end etching equipment designed for cost-effective and time-saving production in the high-volume semiconductor and integrated circuit industries. Utilizing Vector Process Control, Vector Express system is built around the proven NOVELLUS platform, providing fast and consistent results on a wide range of etch applications. Operating at speeds up to 6,000 wafers per hour, NOVELLUS Vector Express has the capability to etch intricate features of less than 1 micron with high repeatability and precision. Vector Express was designed for absolute uniformity, allowing for greater process control in comparison to manual etching systems, and allowing fabrication engineers to quickly establish a highly-efficient etching process. The integrated unit comes complete with a Standard Process Module (SPM) capable of controlling and integrating up to four chambers, as well as a Cluster Module Repetition (CMR) with additional chambers and process control. NOVELLUS Vector Express machine has a small footprint, making it ideal for use in tight, automated fabrication lins, while its integrated feature set and scalability ensure high-speed performance in a range of applications. The etcher offers closed-loop control of bias, voltage, pressure, and temperature, allowing for precise and controlled etch parameters, ensuring greater detail with minimized errors. Vector Express is designed for photon-activated etching (PAE), a process which uses specialized laser light pulses to etch materials with greater accuracy and resolution than a traditional etcher process. It also includes dedicated Pattern Aging Valve (PAV) technology for remote and unattended operations, allowing for automated start up and shut down without operator intervention. Overall, NOVELLUS Vector Express is designed for optimal etching performance, with integrated hardware support for superior process control. When compared to many of the other etching systems currently available in the industry, Vector Express offers faster processing rates while providing superior performance and cost savings for mass production jobs.