Used NOVELLUS Vector Express #9210888 for sale
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ID: 9210888
Vintage: 2007
PECVD System
Vector processes: Advanced ashable hard mask
Facilities: Bottom
Interconnect cable length: 75 Feet
Primary user interface: Flat panel right
Load lock pump: Express load lock pump
Atmospheric robot: Friction end effector
Mounting for light tower:
Audio buzzer
Wall / Flush mount
System options:
Signal tower: 4 Color light tower (RYGB)
IMM Readiness: Over left load lock
Third FOUP Option
(3) Foup RF ID reader
FA Communication interface
Advanced AHM deposition kit
EBR Capable load lock
Pressure display package
Heated process manometer
Leak check shut off valve
2007 vintage.
NOVELLUS Vector Express is a state-of-the-art etcher / asher designed to provide optimal quality and performance for etching and ashing in semiconductor device fabrication. It has been developed with advanced technology to enable the fabrication of better quality chips at a more efficient rate with lower processing costs. This makes it the perfect tool for manufacturers looking to increase production with improved cost efficiency. Vector Express is built on an advanced platform that provides superior etching/ashing methods for a wide range of materials. It utilizes a laser beam with a predetermined etching/ashing rate that can precisely control the etching/ashing process. NOVELLUS Vector Express also has an advanced process control equipment that helps to optimize the results and ensure a consistent quality across etches/ashes. In addition, the system can run up to nine different processing recipes, providing the flexibility to create customizable modes for various materials. In addition to maximizing the accuracy of the etching/ashing process, Vector Express also provides a host of other features that make it one of the most advanced solutions available on the market. This includes a low temperature ashing unit that can reduce the risk of material damage while still achieving the desired etching results, as well as a precision cleaning and aligning machine that helps to reduce non-uniform image artifacts. NOVELLUS Vector Express further boosts its already superior performance through the use of an advanced, low-noise load lock tool for improved wafer handling. Vector Express is also equipped with an intuitive user interface and extensive safety features. This includes an auto-shutdown in case of process abnormalities, as well as alarm notification and monitoring of etch parameters. All of these features combined make NOVELLUS Vector Express a powerful and reliable etching/ashing asset. With its advanced technology and comprehensive features, Vector Express is ideal for providing superior etching/ashing performance on a range of materials for semiconductor device fabrication.
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