Used NOVELLUS Vector Sola #293641465 for sale

NOVELLUS Vector Sola is an etcher/asher equipment that is used to etch and asher various layers of semiconductor devices. This system uses a multi-beam laser to accurately combine etching and ashing in a single step, allowing for fast prototyping and semiconductor production. The unit is based on a digital light processing (DLP) projection machine, combined with a number of lenses and mirrors that focus and direct a laser to the processing area. The DLP module has an advanced spatial light modulator (SLM) with a 260 nm wavelength that can process feature sizes as small as 35nm. This is the highest resolution of any of the current generation of etchers/ashers. Vector Sola also features a High Productivity Etch (HPE) mode which increases processing speed up to threefold compared to other systems on the market. Other unique features include JetEtch technology which provides pulsed plasma etching with little time lag between consecutive pixels. This makes it possible to etch deep or wide trenches quickly. The tool has a number of other advantageous features such as Argon Plasma Protection (APP) that protects the substrate from gas flow fluctuations, Self-optimizing Excimer Laser (SEL) that improves laser energy and power stability, and advanced Scan Stage motion technology that increases process accuracy. NOVELLUS Vector Sola is equipped a user-friendly graphical user interface (GUI) for controlling operations and features, and configurable parameters for optimal etching and ashing. The interface also enables users to view etching and ashing progress, which is important for precise process control. In addition, Vector Sola is optimized for cost-effectiveness and can accurately perform post etch cleanups such as wet cleans, ash-before-etch, and skip-etch. The asset's compact size helps to reduce model costs and allows for automation in semiconductor production operations, such as autostaining, autostrip, and autotransfer. NOVELLUS Vector Sola is an ideal choice for applications that need multi-beam laser etching and ashing with precise control, high resolution and high throughput. It is a highly versatile equipment with a range of configurable parameters that can be easily tailored to meet the needs of various production processes.