Used NOVELLUS Vector Sola #9285851 for sale

NOVELLUS Vector Sola is an advanced etcher/asher designed to enable advanced metrology and advanced process modules for high-precision etching, ashing, and vapour phase deposition (PVD) applications. Vector Sola features a high-speed, high-precision, and cost-effective solution for advanced process applications, providing customers with an optimal solution for their patterning and deposition needs. NOVELLUS Vector Sola is equipped with a 16 inch monitor for a user-friendly interface, an I-LID™ deposition equipment, and a QuikLoad™ wafer processing system to achieve superior process control during depositions and etching. Additionally, Vector Sola offers a high-precision placement unit including advanced software algorithms for precise and efficient wafer loading and unloading. NOVELLUS Vector Sola utilizes the latest technologies in etching, ashing, and deposition systems to deliver superior performance. It is equipped with an advanced RF/gamma source for superior etching performance, a dedicated 1150°C quartz tube furnace for ashing applications, and a unique QuikLoad ™ wafer processing machine for process control. Additionally, Vector Sola utilizes a proprietary gas delivery tool which enables precisely controlled flows of reactive gases for rapid thermal processes. NOVELLUS Vector Sola also includes a wide range of advanced detectors and metrology components to enable precise and accurate analyses throughout the etching, ashing, and deposition processes. A wide range of optical detectors such as the QuickScans™ reflectometer and the QuikGuage™ metrology asset offer precise and accurate analysis. A specialized quenching stage is also available for added uniformity, efficiency, and accuracy. Vector Sola also features configurable gas delivery control with precision mass flow controllers designed to provide accurate and repeatable flow rates. This model offers high pressurized tunneling and directional gas delivery which provides precision disruption of the desired film or layer. Overall, NOVELLUS Vector Sola is a high-performance etcher/asher featuring advanced technologies, precision metrology, and process control systems, providing customers with a superior choice for etching, ashing, and deposition applications.