Used NOVELLUS Vector #9262780 for sale

NOVELLUS Vector is an etcher / asher designed to enable production of semiconductor devices with excellent feature size, depth and uniformity. It is particularly well suited to producing ultra-fine pitch products such as DRAM back-end interconnects, Contact/via arrays, PWB and flip-chip substrates. Vector is a high-throughput equipment with precise mask placement capabilities. It is built around a high-performance scan table and an advanced ICP etch source. This setup allows for the etch process to be accurately adjusted, leading to exceptionally high quality results. An array of advanced imaging and metrology tools are also included, enabling non-destructive process control. NOVELLUS Vector's extended working envelope ensures that features of all sizes and geometries can be etched with high accuracy. Vector utilises a flexible PECVD/OCD oxide coating prior to etching. This coating provides superior defect control, enabling process yields to be maximised while ensuring excellent conformality on even the most challenging substrates. NOVELLUS Vector is also highly efficient at etching via dual-layer features and blind vias. The sysem is capable of etching through-holes, contacts, and other feature types with exceptional depth uniformity and fine line resolution. Vector's advanced process control ensures excellent repeatability and low defectivity. The system's advanced process monitoring and control capabilities drastically reduce cycle times and ensures that the etch process is held to precise specifications. This leads to improved yields and minimised scrap rates. The unit also comes with advanced defect monitoring and control capabilities, giving it superior defect detection capability compared to traditional etchers. All in all, NOVELLUS Vector is an exceptional etcher / asher with superior process control capabilities. The machine helps to drastically reduce cycle times and can easily etch ultra-fine pitch products with consistent depth estimates and minimal edge roughness. Its advanced imaging and metrology tools ensure that it produces products of the highest quality with very minimal scrap rates.