Used NOVELLUS Vector #9294444 for sale

NOVELLUS Vector is an industry leading etcher / asher, used in chemical mechanical polishing, or CMP. It produces consistently high-quality results and is designed for a variety of etch and CMP processes. Using a unique combination of hardware and software, Vector provides consistently high etch rates, chemical selectivity, and surface planarization across a variety of materials. NOVELLUS Vector is a versatile etcher / asher designed to automate the etching and chemical mechanical planarization (CMP) process. It is a modular system that can be customized to the user's needs and is designed for use in advanced semiconductor manufacturing. Vector features a number of advanced design and etching components which ensure precision and control. NOVELLUS Vector utilizes a PECVD (Plasma Enhanced Chemical Vapor Deposition) to deposit SiO2, nitrides and other related films onto the substrate of choice. This deposition process is then followed by RIE (Reactive Ion Etching) and CMP (Chemical Mechanical Polishing) technology to complete the etching and planarization process. Vector is capable of etching and planarizing materials up to 500nm thick, and features an integrated plasma source, as well as the latest advances in etching technology. NOVELLUS Vector also features a unique software interface that allows for precise control over process parameters as well as full automation of the etching process. This makes it easy for users to adjust settings and create customized etching jobs while having the peace of mind that their etch results will remain consistent no matter how many times the parameters are adjusted. This software is built in a user friendly language and includes tutorials and online support. In addition to the technology behind Vector, it also has a sophisticated chamber design and fabrication that provides the highest level of reliability and performance. The chamber components are designed to accommodate both the CMP and etching processes, helping to ensure accuracy and precision throughout the entire etching and planarization processes. Overall, NOVELLUS Vector is an industry-leading etcher / asher designed to deliver the highest quality, consistently precise results. It features advanced hardware and software technologies, along with a comprehensive chamber design and fabrication to ensure reliability and performance. Vector is perfect for industries of any size and is an ideal choice for all of your etching and planarization needs.