Used NOVELLUS Vector #9379236 for sale

NOVELLUS Vector is a highly-precise etcher/asher developed by NOVELLUS Systems for etching and ashing of a wide variety of materials. Vector is capable of fine precision etching and ashing at sub-micron levels (sub 5nm). It employs NOVELLUS patented scanning electron beam (SEB) technology to deliver an extremely precisely focused beam of electrons which is necessary for high-quality, fine-line etching and ashing, which are essential in the production of complex, fine-pitch chips. NOVELLUS Vector also features a single-wafer load lock, an internal heat sink, and an external thermal chuck for accurate thermal control. The wafer is loaded in Vector's load lock chamber, and the beam is focused on its surface. With its highly precise scanning pattern and ultra-fast pulse rates, NOVELLUS Vector is capable of etching and ashing faster than most competitive solutions, while always achieving the highest resolution and quality. Furthermore, Vector's SEB enables the user to apply materials for etching onto the wafer with high accuracy and uniformity. NOVELLUS Vector also works seamlessly with other NOVELLUS systems, allowing for a high degree of process automation and integration. In addition to Vector, the company also offers the Ares Fast Copper Damascene Solutions, the Evolution Dielectric Etching System, and the Production Eversharp etching/ashing system. These options offer a range of etching/ashing techniques for various types of materials.