Used OCCLEPPO 650-97-P-150 #9003042 for sale

OCCLEPPO 650-97-P-150
ID: 9003042
Vintage: 1998
Surface preparation for HAL 1998 vintage.
OCCLEPPO 650-97-P-150 etcher / asher is a perfect choice for advanced wafer processing applications. This machine offers high process repeatability and long-term reliability. Its two-level temperature control equipment ensures excellent process temperature stability which is critical for achieving high yield. 650-97-P-150 etcher / asher features a spacious, 300-microliter process chamber which allows for the direct etching and ashing of wafers up to 150 mm in diameter. The chamber is equipped with a 25-position rotary end-effector that securely and accurately holds and transports wafers during the etching and ashing process. It also features a Variabled Pressure Processing (VPP) system that ensures higher etch and ash rates without compromising wafer integrity. OCCLEPPO 650-97-P-150 etcher / asher has a built-in particle filtration unit to minimize wafer contamination. It features an integrated liquid gas injector and advanced dual temperature control systems for added process flexibility. It also features an inductive heating machine to ensure uniform wafer heating, and a process monitoring tool with analog and digital I/O for process tracking. For added safety and convenience, 650-97-P-150 etcher / asher includes safety interlocks, leak and overpressure lockout circuitry, isolated exhaust vents, and an integrated fire suppression asset. OCCLEPPO also features a 10-step touchscreen controller for easy process setup and all essential parameters are clearly monitored on the LCD display. OCCLEPPO 650-97-P-150 etcher / asher is compatible with multiple source gases and can be easily calibrated for different gases. It has a compact design, making it perfect for integrating into a processing line. With its superior build quality and reliable performance, OCCLEPPO is an excellent choice for efficient, accurate wafer processing applications.
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