Used OXFORD 100 + #9139601 for sale

OXFORD 100 +
Manufacturer
OXFORD
Model
100 +
ID: 9139601
Wafer Size: 6"
RIE system, 6".
OXFORD 100 + is an etcher / asher designed for general electronics applications requiring vapor phase etching and ashing in a variety of gases. 100 + utilizes a ceramic heating element and quartz tube to provide a consistent temperature and uniform distribution of gas throughout the chamber. Precision temperature control combined with a precise flow-control approach allows for the highest level of control of etch or deposition parameters. With a small footprint, OXFORD 100 + offers a compact solution for high-end etching and ashing applications. The design of 100 + allows for simple etching and ashing of electronic components and materials. The chamber of OXFORD 100 + is constructed from quartz which ensures a high quality passivation of reactive materials. The quartz tube is designed to allow for uniform distribution of gases, providing reliable etching and ashing results regardless of substrate size or complexity. 100 + also utilizes a Teflon-insulated ceramic element in the center of the chamber for heating. The heater is powered by an external power source and delivers a consistent temperature for etching or ashing. OXFORD 100 + also features a flow-control equipment to ensure accuracy in the etching and ashing process. This system consists of an LFC (Low Flow Controller) and CFC (Constant Flow Controller) assembly which connects to the gas source and chamber respectively. The LFC allows for the precise and consistent metering of the gas, while the CFC maintains a consistent internal chamber pressure. As additional control, 100 + can be utilized with flow control valves which can govern the incoming and outgoing flow of gas. OXFORD 100 + is an effective etching and ashing solution for many types of electronics projects. Its quartz tube construction and Teflon-insulated ceramic element provide consistent temperatures and reliable etching or ashing. The accuracy of this unit is further enhanced by the flow-control machine which ensures precise and singular gas delivery and chamber pressure maintenance. When it comes to high-end etching and ashing, 100 + is the ideal choice.
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