Used OXFORD / LANCER 1000 #126491 for sale

OXFORD / LANCER 1000 is an advanced etcher/asher machine designed for precise plasma etching and ashing. It utilizes unique process control technology to achieve superior etch uniformity over large areas and at fast cycle times, as well as precision etching and ashing within smaller areas. The combination of these features makes OXFORD 1000 an ideal tool for use in photomask production, micromachining, and other precision processes. LANCER 1000 has a triple-axis arm for precise moving of the plasma source. It includes an efficient gas feed equipment to minimize system downtime, a high-resolution imaging detector to ensure accurate plasma distribution throughout the entire substrate, and a maximum working area of 1000 x 1000mm. Its powerful control unit enables independent control of power and pressure for both etching and ashing processes, and ensures precise control of the process. OXFORD / LANCER 1000 is designed to provide tight process control and yield uniformity for a wide variety of materials including, but not limited to, silicon wafers and MEMS devices. It has a high process throughput which makes it suitable for production environments, and a low total cost of ownership as a result of its efficient operation. The machine is also designed for compatibility with a variety of in-chamber plasma sources, enabling it to support a range of research and industrial applications. The robust software included with OXFORD 1000 provides an easy to use graphical programming language for easy and precise programming of the etching and ashing process. It includes built-in safety features such as real-time monitoring of pressure, temperature, and energy consumption. Additionally, software extension kits are available to extend the tool to support customized process sequences or other advanced requirements. Overall, LANCER 1000 is designed for a wide range of etching and ashing applications and is capable of performing precise etching and ashing at a high productivity rate. It is suitable for a variety of substrate materials, and its easy-to-program software makes it an ideal choice for scientists, engineers, and technicians working on experimental or production applications.