Used OXFORD MicroEtch 300 #9304128 for sale

OXFORD MicroEtch 300
ID: 9304128
System.
OXFORD MicroEtch 300 is a highly efficient and versatile etcher / asher that utilizes advanced vacuum technology to process substrates of varying sizes and materials. It is designed to be used in a wide range of applications, from prototype development and production to high-end research and characterization. MicroEtch 300 is suitable for use in semiconductor, MEMS, and OLED processing. OXFORD MicroEtch 300 offers a number of features and capabilities that make it a powerful etcher for a variety of applications. It is designed to provide high throughput, low temperature, and high uniformity, making it an ideal choice for high-precision processing. It also provides an easy-to-use platform with an intuitive control interface and adjustable functions, allowing users to customize the system to their specific needs. MicroEtch 300 utilizes a combination of Ion Beam Etching (IBE) and Reactive Ion Etching (RIE) of the substrate material to achieve desired etching profiles. The IBE process provides high etch rates and uniformity for shape or pattern processing, while RIE is used for precise surface or layer removal. OXFORD MicroEtch 300's efficient design enables users to etch substrates ranging from 50 - 200 mm in size. MicroEtch 300 utilizes a Variable Frequency Generator (VFG) to provide uniform power distribution throughout the etching process. This ensures stable and reliable etching even in high aspect ratio etching applications. OXFORD MicroEtch 300 also features a high vacuum operation with static and dynamic pressure control, and an Argon Ion Source for high etch rates. In addition, MicroEtch 300 provides fully automated cycle management and the ability to save and recall process parameters for repeatable results. Its built-in process monitor and its support of multi-purpose recipes via its Recipe Editor, allow users to adjust etching recipes as needed, as well as track and store any process details or recipes used. Overall, OXFORD MicroEtch 300 is a highly efficient and versatile etcher / asher that provides users with a reliable and precise etching solution for a wide range of applications. With its advanced vacuum technology, highly adjustable functions, intuitive user-interface, and increased throughput capabilities, MicroEtch 300 is an ideal choice for those in need of a high-performance etching system.
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