Used OXFORD NGP-1000 #293751615 for sale

OXFORD NGP-1000
Manufacturer
OXFORD
Model
NGP-1000
ID: 293751615
Wafer Size: 8"
Vintage: 2012
PECVD System, 8" 2012 vintage.
OXFORD NGP-1000 is a state-of-the-art etcher/asher equipment designed for advanced semiconductor processing applications. This tool combines cutting-edge technology with precision control to deliver excellent process performance and repeatability. OXFORD NGP1000 is a versatile tool that can accommodate a wide range of wafer sizes and materials, making it suitable for various research and production environments. At the heart of NGP-1000 is its innovative process chamber, which features a high-power plasma source capable of generating various reactive species necessary for etching and ashing processes. The plasma source is typically created using a combination of gases such as oxygen, fluorine, and argon, which are fed into the chamber at controlled flow rates. These gases are then energized using radiofrequency (RF) power to create a high-density plasma capable of etching and ashing semiconductor materials with high precision. NGP1000 also boasts advanced process control capabilities, with features such as endpoint detection, pressure control, and temperature control. Endpoint detection is a crucial feature that allows the system to accurately determine when the etching or ashing process is complete, ensuring minimal over-etching and preserving the integrity of the semiconductor device. Pressure control mechanisms help maintain the optimal pressure conditions inside the process chamber, while temperature control ensures that the wafer temperature remains within a specified range to prevent thermal damage. One of the key advantages of OXFORD NGP-1000 is its high throughput capabilities, allowing users to process multiple wafers in a single run. This is achieved through advanced wafer handling systems that ensure efficient loading and unloading of wafers, minimizing process downtime and maximizing productivity. Additionally, OXFORD NGP1000 is equipped with intuitive user interfaces and software controls that make it easy to set up and monitor processing recipes, making it ideal for both experienced researchers and new users. NGP-1000 is also designed with flexibility in mind, offering a range of process customization options to accommodate different etching and ashing requirements. Users can adjust various process parameters such as gas flow rates, RF power levels, and process pressure to achieve precise control over the etching and ashing processes. Additionally, the unit can be equipped with different gas input systems and substrate holders to support a wide variety of materials and substrates. In terms of safety and reliability, NGP1000 incorporates robust safety interlocks and monitoring systems to ensure safe operation at all times. The machine also features built-in diagnostic tools and remote monitoring capabilities, allowing for proactive maintenance and troubleshooting to minimize downtime and maximize tool uptime. Overall, OXFORD NGP-1000 is a highly advanced etcher/asher asset that offers unparalleled performance, flexibility, and reliability for advanced semiconductor processing applications.
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