Used OXFORD NPT1000 PE #293597503 for sale

OXFORD NPT1000 PE
Manufacturer
OXFORD
Model
NPT1000 PE
ID: 293597503
Reactive Ion Etcher (RIE) Cluster system.
OXFORD NPT1000 PE is an advanced, transportable etcher/aser designed for a variety of substrates, including polyimide substrates, and for either wet or dry etching applications. The unit has a robust steel construction that provides a stable, low-temperature platform for reliable etching performance. NPT1000 PE features a temperature range of up to +160°C with a high-performance heater that rapidly stabilizes the etch temperature. The precision temperature control is provided by a digital display that indicates the current temperature setting and includes precision set points in one °C steps. The etch process can be precisely controlled with the user-friendly control panel and the unique optical sensor accuracy that uses UV-C and UV light sources to accurately measure the etching process. This allows for precise variations in etch times and temperatures to create extremely reliable etch results. The work station also has a Pulsed-Etch Mode designed for higher-temperature (> 180°C) etch processes. The use of pulsed etch patterns helps to reduce the etch temperature, increasing the process safety and improving throughput. OXFORD NPT1000 PE is extremely user friendly and easy to install and maintain, featuring multi-lingual user and service support. The Machine Insight™ (MI) suite, available for monitoring the device performance and etch process, provide additional support of the Imaging Device and Machine Insight application software. The MI suite is designed to observe the etch process and provide feedback to the user based on the machine's current status. This comprehensive predictive software suite can help to identify process issues and take corrective action as soon as possible, saving time and resources. NPT1000 PE has a variety of integrated options and features, including an ion lift pin mechanism that helps to hold substrates in place during the etch process, an anti-tilt platen to prevent sample misalignment, and a dual gas control manifold that allows simultaneous use of both dry and wet processes. The etch process can also be automated with an optional Process Automation Package (PAP) that provides optimized recipes for a wide range of etch processes. In addition to its user-friendly, transportable design, OXFORD NPT1000 PE is designed for safe and efficient operation. The unit is equipped with over temperature protection and process security systems designed to minimise environmental contamination and maximize operator safety. This etcher/aser is an ideal choice for rapid, high precision etching of polyimide substrates and a variety of other substrates.
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