Used OXFORD Plasmalab 100 Plus #293637903 for sale

OXFORD Plasmalab 100 Plus is a second-generation multi-frequency, mid-size inductively-coupled plasma (ICP) etcher / asher equipment. This ICP etcher / asher is capable of delivering precise etching on various materials, including polysilicon, silicon dioxide, silicon nitride, photoresists, metal oxides, and metal nitrides. It is designed with optimal process conditions such as high pressure, low power, and fast cycle times. The ICP etch process is highly repeatable and is capable of producing high-quality surfaces. Plasmalab 100 Plus has an integrated multi-frequency generator with adjustable frequency between 15 MHz and 40 MHz. This provides maximum flexibility when etching different materials in various media. The ICP power source supplied with the etcher / asher is capable of delivering up to 50 watts of power, allowing for the etching of materials that are more resistant than typical materials such as those mentioned earlier. Additionally, the system utilizes a gas flow controller with an adjustable gas flow rate that allows for a wide range of etching recipes. OXFORD Plasmalab 100 Plus also comes equipped with an integrated robotic manual stage, which has a large work table size of 218 mm x 406 mm. This feature provides maximum flexibility for etching different shapes and sizes of materials. An integrated thermal imaging camera can also be used in conjunction with the stage to measure the temperature of the material during etching. Additionally, the unit comes with a full set of software tools for user-defined process recipes, data collection, and reporting. Plasmalab 100 Plus is equipped with multiple safety features such as an interlock machine and an auto-off timer, which help protect the operator from the high temperatures, voltages, and pressures associated with the etching process. The tool includes several other safety features such as a grounded chamber, protective panels, and gas and vacuum safety shut-off valves. Overall, OXFORD Plasmalab 100 Plus etcher / asher is an exceptional piece of equipment which offers maximum flexibility and reliable etching performance. Its superior design and robust components make it a great choice for advanced materials processing, research, and development.