Used OXFORD Plasmalab 100 Plus #9205766 for sale

OXFORD Plasmalab 100 Plus
ID: 9205766
Wafer Size: 6"
Vintage: 1996
PECVD System, 6" 1996 vintage.
OXFORD Plasmalab 100 Plus is a state-of-the-art etching and ashing equipment designed for use in laboratory and research facilities. The system has been designed for the precise etching and ashing of semiconductor materials, microelectronic devices, and MEMS devices. It has able to process a wide range of substrates such as metal, quartz, silicon, glass, ceramics, and polymers. The unit utilizes a low-cost RF power supply to create a high density, low pressure, inductively coupled plasma (ICP) source in a vacuum chamber. The ICP source is then used to etch and remove predetermined portions of the substrate material. The great flexibility of Plasmalab 100 Plus allows the user to customize the etching and ashing process based on the substrate type and desired specifications. The machine features an advanced capacitance-type process controller that is equipped with several parameters such as pressure, temperature, frequency, and gas flow. The advanced process controller can be used to fine-tune etching parameters to achieve the desired results. OXFORD Plasmalab 100 Plus comes with an intuitive user interface that allows users to precisely select the desired etching parameters and enable the auto-operating of the process. The tool also includes a pressure readout and a digital timer for user convenience. The asset features wet etch capabilities, as well as an interface for controlling multiple etching processes. The model is designed for easy maintenance and has a durable stainless steel design. The equipment also features a high-efficiency dust filtration system to reduce airborne particles and hazardous waste in the work environment. Plasmalab 100 Plus is an advanced and reliable etching and ashing unit that provides the user with reliable results. With its precise controls and intuitive user interface, the machine is ideal for laboratory research and development applications.
There are no reviews yet