Used OXFORD Plasmalab 100 Plus #9274966 for sale

OXFORD Plasmalab 100 Plus is an advanced etcher/asher designed for precision and repeatability in modern semiconductor processing. It features advanced touchscreen interactive operation and a full range of function and feature options. This machine features a host of different processes including oxide milling, deep etch, slurry etch, and rapid native oxide removal. It is designed to provide superior results with any metals from titanium to aluminum and copper. Plasmalab 100 Plus is an ideal tool for high-speed precision machining of thin film surfaces. The machine is powered by a standard 110V or 220V power supply and utilizes a DC power supply for maximum control and repeatability of plasma processes. It features a large work area - up to 110mmx110mm with repeatable accuracy and resolution on the z-axis of 0.1 μm. OXFORD Plasmalab 100 Plus is designed to work at an optimal pressure range of 7-30mT and features a maximum temperature of 300°C. The frequency of the plasma generator is adjustable with a peak power of up to 250W. Plasmalab 100 Plus features an adjustable stage that can detect small sub-micron sample shifts and allow for easy process optimization by minimizing any potential damage to the sample. It also features a special flat stage surface design to prevent potential sample warpage due to etch or asher operations. The back side of the machine is equipped with a capture arm system to allow for easy sample and substrate loading and unloading. OXFORD Plasmalab 100 Plus includes a suite of specialized software designed for easy control of the machine functions. It features a library of preconfigured processes for fast and easy setup of etching and ashing operations. The software also allows for custom process setup and the saving and recall of individual processes. Plasmalab 100 Plus is designed for laboratory and production use and provides superior results for a variety of etching and ashing operations. It features a robust construction with a small footprint and lightweight design for easy installation in laboratory or production environments. The high-quality design and advanced features of OXFORD Plasmalab 100 Plus providing outstanding results with precise control and repeatable performance.