Used OXFORD Plasmalab 100 #293640840 for sale

OXFORD Plasmalab 100 is a state-of-the-art etcher/asher used for a variety of microfabrication applications. It is a single-chamber tool that can etch and deposit both positive and negative photoresist. Plasmalab 100 is capable of both wet and dry etching in a wide range of applications and has a highly precise and stable etching environment. The tool is based on a mass-flow etching technique, which is characterized by a high rate of material removal yet a low profile damage. It offers a uniform etching in a wide range of materials, including silicon, gallium nitride, SiGe, and GaN compounds. OXFORD Plasmalab 100 is equipped with a collisionless magnetohydrodynamic (MHD) technology, allowing it to generate a near-zero drift and vibration-free etching environment. This results in uniform, high-quality etching regardless of the environment. In terms of process variables, Plasmalab 100 features an adjustable plasma trigger, gas injection, and gas rotational flow rate to achieve the desired etching recipe. Furthermore, it has a programmable plasma pressure controller which allows for an easily adapted etching process. With its user-friendly graphical user interface, OXFORD Plasmalab 100 can precisely control etch pressure, DC bias, ion energy, proportional and derivative times, and etch rate. Plasmalab 100 can deposit photoresist to substrate surfaces with high accuracy and repeatability. Its multi-electrode plasma sources enable a wide range of etching rates and feature variable chamber pressures of up to 1.0 x 10-3 Torr. The ashing process has an automatic temperature trap feature, which accurately senses the ashing temperature and maintains it without further adjustment. OXFORD Plasmalab 100 uses multi-bounce magnetic field configurations for producing resist stripes for advanced film patterning. Plasmalab 100 is CE certified and meets the requirements of EN 13485 and meets the ISO 13485 and QSR (GMP) standards. It also meets the RoHS, EMC, and CE requirements. With its advanced etching and deposition capabilities and its safety and environmental compliance, OXFORD Plasmalab 100 is an ideal choice for many advanced microfabrication applications.