Used OXFORD Plasmalab 100 #293649326 for sale

OXFORD Plasmalab 100
ID: 293649326
PECVD System.
OXFORD Plasmalab 100 is an etching and ashing equipment from OXFORD Instruments. It is a compact, all-in-one system ideal for sample preparation for semiconductor analysis. It offers outstanding performance, flexibility and reduced processing times. Plasmalab 100 has a simple, user-friendly control interface with two independent process chambers that allow for simultaneous etching and ashing, ideal for sequential processing. The wide range of parameters, such as etching and ashing pressure, temperature and gas flows, can be adjusted easily from the front panel or remote software. The unit is capable of producing very high etch rates with a minimum amount of residues. The dual chambered parallel process allows for efficient processing of multiple samples. The machine has an active temperature range of -40°C to 350°C and can process both organic and inorganic materials. OXFORD Plasmalab 100 is also equipped with a built-in ion gauge and turbo pump-based vacuum tool, enabling long-term high vacuum operation. In addition, the asset comes with a range of accessories and features multiple safety features, such as over-temperature and over-pressure protection, as well as a low gas flow warning model. The built-in data logging and archiving software ensures traceability and provides valuable data for further analysis. Plasmalab 100 is an ideal tool for a variety of applications in semiconductor analysis, such as sample preparation, of MEMS devices, deposition etching, surface cleaning, device oxide etching and more. The equipment provides an excellent tool for a wide range of sample analyses with highly reliable results.
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