Used OXFORD Plasmalab 100 #293651867 for sale

OXFORD Plasmalab 100 is an advanced, next-generation etcher/asher specifically designed for the processing of both hard and soft materials. This single-chamber equipment is capable of both etching with plasma and ashing with oxygen-based reactant gas. This Plasmalab 100 is equipped with a direct-flow based low pressure plasma source, as well as a high power remote plasma source, both of which can handle various operating gases. OXFORD Plasmalab 100 can also be used for very precise plasma etching of all types of materials, including polymers, metals, and semiconductor materials, enabling almost any etching application. Plasmalab 100 offers numerous advantages, including a unique integrated electrical chuck which ensures uniform the etch rates across the substrate surface and a feeding system which permits resin pellets in large quantities or small pieces to be efficiently loaded into the chamber. Moreover, OXFORD Plasmalab 100 features an intuitive user interface and supports up to four etch recipes simultaneously, allowing for large-scale manufacturing operations. Furthermore, Plasmalab 100 also features a dual-pressure, dual-gas unit that can combine a wide range of to plasma chemistries for feature size down to less than 10nm, enabling industry-wide cutting edge fabrication processes. The machine's excellent control features also ensures repeatable results are generated. For safety and environmental protection, OXFORD Plasmalab 100 offers numerous safety features, including an automatic safety valve, fire safety, gas shut-off and short circuit protection systems. Additionally, Plasmalab 100 provides users with a wide variety of monitoring and control capabilities, as well as data logging capabilities, all of which allow users to take full advantage of the sophisticated etching and ashing processes enabled by this etcher/asher.