Used OXFORD Plasmalab 100 #9364612 for sale

OXFORD Plasmalab 100
ID: 9364612
Wafer Size: 2"-6"
PECVD System, 2"-6".
OXFORD Plasmalab 100 is an advanced etcher and asher specifically designed for precision plasma processing. It offers a wide range of features that enable users to achieve more precise processing results. The etcher is built from a combination of metals and plastics and includes a high power sample holder which can reach temperatures of up to 4500°C. Its embedded software is easy to use and provides users with complete control over temperature, pressure, power and total etch time of the process. The asher has an etch area of 150mm with a high-pressure working range of 0-450 mtorr. It has a cooled Pyrex® chamber which is sealed with an O-ring seal, and not evacuated. This provides higher processing accuracy and maximizes etch rate. Furthermore, the etcher contains a high resistance shield with a Faraday cage to suppress interference and arcs while providing long range protection. It also has a built-in air filtration system and a low temperature anti-oxidation coating which helps reduce processing contaminants and particle build-up. Plasmalab 100 offers rapid thermal accelerations to significantly reduce cycle times. It has a high precision z-height adjustment and a color-coded entry/exit system which allows users to quickly select the correct process steps. It also features an intuitive digital control system with a touch panel that enables users to accurately track each step of the etching process. OXFORD Plasmalab 100 etcher is designed for optimal safety and strength with an easy chamber cleanup process. Its plasma generator has been rigorously tested to ensure accurate results with minimal maintenance, and its advanced design provides the highest precision plasma processing in the market.
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