Used OXFORD Plasmalab 133-ICP 380 #293690524 for sale

OXFORD Plasmalab 133-ICP 380 is an advanced etcher/asher designed to enable high precision micromachining of a range of materials. It features a variable frequency ICP power source which is rated power up to 380 W and capable of generating fast sputter etching rates to provide excellent process repeatability and improved throughput. The equipment offers dual plasma capabilities, enabling standard reactive ion etching (RIE) and remote plasma etching (RPE) techniques. OXFORD PLASMALAB 133 ICP380 is equipped with a vacuum chamber and pumping system, allowing users to achieve very high vacuum levels. The unit is also supplied with an open-load locked process chamber design, allowing for fast and reliable etch protocols. The machine includes a compact, low-cost ICP power source, eliminating the need for an external power supply. This provides long service lifetime and robust performance. In addition, PLASMALAB 133 ICP 380 is also provided with a fully-customizable gas delivery tool, ensuring full control over the etch process. This includes a variety of automated valve control and metering units, as well as a multi-channel gas control asset that can be monitored and adjusted remotely. This ensures process reproducibility and repeatability. An onboard software package enables the user to monitor, control, and log all of the critical etching and deposition parameters during a process. This software package is fully compatible with the IPC lab management model, allowing for the full monitoring and control of complex experiments over long-term processes. Finally, OXFORD PLASMALAB 133 ICP 380 is also equipped with a range of safety features, such as the automatic shut-off switch and purge equipment. This ensures high levels of safety during operation, protecting against accidents and contamination. Overall, PLASMALAB 133 - ICP 380 is an advanced etcher/asher designed to provide maximum process control, precision, and throughput.