Used OXFORD Plasmalab 133 Plus #293760250 for sale

OXFORD Plasmalab 133 Plus is a plasma etching / asher equipment that is used for industrial-grade etching and ashing applications. It combines high-power microwave plasma sources with advanced etching and ashing technology. The system is based on a 200 mm plasma processor and is capable of producing high-resolution thermal and plasma process results. This unit offers a wide range of anisotropy control, allowing its users to achieve very precise etching and ashing results. Plasmalab 133 Plus offers a wide range of features. It features a 1,200 µm uniformity resolution that can be used in processing materials with high aspect ratios. It is capable of doping/undoping layers up to 200nm in thickness with very high precision. Furthermore, it is equipped with a variety of alternate process sources for aluminum and copper deposition, anodization, screen printing, spin-on non-conductive dielectrics, and sputter etching. When it comes to safety, OXFORD Plasmalab 133 Plus has been designed to meet rigorous safety standards. It features Interlock-Net safety systems that monitor pressure, temperature, and safety parameters and ensure continuous and safe operation. Additionally, it has a low-end exhaust management machine that reduces the impact of hazardous materials and helps ensure compliance with environmental regulations. In terms of productivity, Plasmalab 133 Plus offers a high throughput of up to 700 wafers per hour. It is also equipped with advanced process control features such as automated process parameters, process recipe programming, and monitoring of wafer-level conditions. Additionally, it incorporates a graphics-user interface that allows users to view a wide range of process metrics. OXFORD Plasmalab 133 Plus is an advanced and highly responsive etching and ashing tool for the semiconductor industry. It is designed with an impressive set of features and tools that allows users to achieve very precise results with minimal effort.