Used OXFORD Plasmalab 80 Plus-M #293604357 for sale

OXFORD Plasmalab 80 Plus-M is an etcher / asher equipment designed for the rapid creation of fine-line etches and ashes in low-pressure plasma environments. The system is a fully automated and highly versatile unit capable of processing substrates of various shapes and sizes. The machine consists of a vacuum chamber and a gas delivery tool with direct connections to several gas sources, allowing for multiple process conditions to be maintained. Plasmalab 80 Plus-M utilizes a capacitively coupled plasma (CCP) source, powered by a high-frequency power supply, to enable the etching and ashing process. A range of gases, including oxygen, nitrogen, argon, fluorocarbons, and hydrocarbons can be used, along with a range of pressure and power levels to facilitate high resolution etching and ashing. The asset is equipped with a programmable turntable, allowing for the convenient loading and processing of multiple substrates. The deposition uniformity is enhanced through a symmetric deposition shield with an embedded Arduino microcontroller for precise gas flow control. The energy utilization of the model is maximized through coil quench technology and fast cycle times, which can be as low as 30 ms. In addition, the equipment is equipped with a monitoring system to monitor the deposition conditions, chamber temperature and cleanliness. OXFORD Plasmalab 80 Plus-M is an ideal solution for high precision, reliable and repeatable process results.