Used OXFORD Plasmalab 80 Plus #293607498 for sale

OXFORD Plasmalab 80 Plus is an etching and ashing tool for preparation of samples for analysis. It supports both plasma etching and ashing processes in order to remove the material layers from the sample surface with high precision. It can support the etching and ashing processes of different materials such as Si, GaAs, and InP. The etcher is equipped with a dedicated PlasmaEtch Source, which is designed to provide optimized levels of auto-compensation, load-matching, and other performance-enhancing features to ensure consistently high productivity and process quality. With its integrated wafer chuck design, the PlasmaEtch Source allows for efficient alignment of samples and rapid transfer of etching gas and nanosecond pulsed plasma power. The wafer chuck design also offers support for different sample sizes, up to eight inches in diameter. The etching process is performed in a low-pressure, high-temperature plasma chamber, which is equipped with EMI filters to maintain the cleanliness of the etching environment. The chamber is also equipped with an in-situ gas scrubber, to enable exhaust gas recovery and recycle capability for maximum etching yield. In addition, the chamber features an automated in-situ sensor for accurate and repeatable process control. The etching process is complemented by an advanced safety system, which prohibits the start of the process until all safety parameters have been met. The ashing process employs a technologically advanced "Single Ash Source". It supports both TMAH ashing and RCA-1 clean ashing. The "Single Ash Source" offers additional control of etch temperatures, as well as the stability of the ash process. The system also features an integrated gas scrubber for temperature recovery and recycle of the exhaust gasses, when required. Plasmalab 80 Plus also features an intuitive software interface, which provides for effective process setup and control. Through its graphical user interface, process recipes can be easily created, edited and monitored, and process parameters adjusted in real-time. The software also allows for convenient data storage and export, for easier sharing and process optimization. All in all, OXFORD Plasmalab 80 Plus is an ideal tool for performing etching and ashing processes of various materials. Its sophisticated technology and its comprehensive software suite make it an ideal choice for sample preparation in a variety of manufacturing and research-related applications.