Used OXFORD Plasmalab 80 Plus #293660207 for sale

ID: 293660207
Vintage: 2005
System Gases: SiH4, NH3, N2O, N2, CF4 2005 vintage.
OXFORD Plasmalab 80 Plus is a high-performance, automated Plasma Etcher and Asher. It provides excellent plasma etching performance on complex structures with high quality and reproducible results. Plasmalab 80 Plus is equipped with a high-power ECR source and motorized stage for speed and accuracy, making it suitable for a wide range of materials. The powerful motorized stage of the Oxfod OXFORD Plasmalab 80 Plus can achieve scanning speeds up to 100 mm/s and step sizes as small as 1 µm. An advanced control equipment ensures excellent repeatability and uniformity of etch rates across the wafer. Plasmalab 80 Plus also features a low-pressure, closed-looped system for efficient etching of micro-structures. The precise operation of the low-pressure unit enables precise etching of smaller features and minimizes particle-deposition. OXFORD Plasmalab 80 Plus is also equipped with a high-efficiency cooling machine, which minimizes thermal stress on the wafers during etching. This tool helps to promote a longer service life of the device and a higher etching performance. Plasmalab 80 Plus is also equipped with an automated gas delivery asset, which is designed to deliver multiple gas flows precisely tailor the etching process for a variety of wafer materials. This model helps to optimize the etching process, minimize material loss, and reduce production times. OXFORD Plasmalab 80 Plus also features a software control equipment, which allows for easy programming and control of the etching process. The onboard systems allow for improved system control, higher accuracy, and faster etching. Plasmalab 80 Plus is an advanced, reliable, and easy to use plasma etching unit. It provides excellent etching performance on a wide range of materials with high precision and repeatability. It is an ideal machine for small and large production runs and low cost-per-part etching.
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