Used OXFORD Plasmalab 80 Plus #293668719 for sale

OXFORD Plasmalab 80 Plus is a state-of-the-art Asher/Etcher designed for the fabrication of sub-half micron fine metal patterns for high-tech applications such as wafer level packaging, printed circuit board fabrication, and MEMS fabrication. This equipment uses two distinct technologies - the reactive ion etching (RIE) and plasma enhanced chemical vapor deposition (PECVD) - to etch, deposition, etch and deposition at the same time. The RIE technology can etch with high precision, while the PECVD is used to deposit films with precise thickness. Plasmalab 80 Plus is equipped with a dual ion source, allowing for ultra-precise etching of a wide variety of materials. This etcher is also outfitted with a hi-tech motorized stage and a temperature adapted vacuum, ensuring precise, repeatable etching and deposition results. OXFORD Plasmalab 80 Plus offers a wide variety of process recipes for different etching and depositing tasks, and is equipped with a gas mixing system, as well as integrated software and hardware for controlling and monitoring the etching and deposition processes. Plasmalab 80 Plus has a sophisticated control unit, and can process up to a maximum wafer size of 200 mm. The etcher is simple to operate, allowing for quick setup and changing of processes and recipes. Finally, OXFORD Plasmalab 80 Plus is ideal for labs that require an etcher/deposition machine capable of taking on complex and advanced projects.