Used OXFORD Plasmalab 80 Plus #293670958 for sale

ID: 293670958
System Blanking plate has been removed.
OXFORD Plasmalab 80 Plus is a top of the line etcher / asher equipment. It is used primarily in the semiconductor industry for fabrication of thin films, deposition and etching. The system is designed to achieve superior etching resolution and high quality films while utilizing a low power, cost effective process. Plasmalab 80 Plus is equipped with a global power supply, an electronic pressure controller, an electron gun, and a high-vacuum unit with a required base pressure of 5x10-7 Torr (35 mBar). An integrated gas panel with precise gas adjustment allows for precise process control. The etch chamber is designed and constructed to provide superior process uniformity, as well as a large chamber volume for larger wafers. In addition, OXFORD Plasmalab 80 Plus has an integrated backside cooling stage, designed to ensure uniform film production. In addition designed for optimal sub-micron etching and plasma cleaning resolution, Plasmalab 80 Plus is equipped with a number of features and components to ensure maximum performance levels. An advanced imaging optical machine allows real-time monitoring of the etching process, while an Auto-Focus Autostereoscopic Scanning heads tool enables essential imaging parameters to be maintained. The asset is also equipped with a Multi-Mode feature that allows up to four etching processes to be programmed and operated in one chamber at the same time. OXFORD Plasmalab 80 Plus also features a quality Film Inspection Video Model that provides hundreds of inspection images for real-time monitoring of process performance. Finally, an integrated, user-friendly Graphical User Interface (GUI) provides an accurate and intuitive way to program and monitor processes. Plasmalab 80 Plus is a highly sought-after etcher / asher equipment that delivers superior etching resolution and high quality thin films at a low cost of ownership. With a robust power supply, integrated gas panels and a Multi-Mode feature, the system is exceptionally well equipped to meet the requirements of the semiconductor industry. The integrated backside cooling stage and imaging optical unit allow optimal uniformity and more efficient production. Finally, OXFORD Plasmalab 80 Plus etcher / asher is backed by a user-friendly GUI and Film Inspection Video Machine to ensure the highest levels of performance and satisfaction.
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