Used OXFORD Plasmalab 80 Plus #293697553 for sale

ID: 293697553
Wafer Size: 4"-6"
Vintage: 1995
PECVD System, 4"-6" Deposition: SiO2 Dep, SiH4 at 300°C No burner gas abatement EDWARDS E2M80 Vacuum pump RF Generator PC Controller 1995 vintage.
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