Used OXFORD Plasmalab 80 Plus #293764146 for sale
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ID: 293764146
Reactive Ion Etcher (RIE)
Upgraded to X20 PLC
ATP400 HPC Pump
RFX600A Generator
Gas box
Turbo pump
Monitor
PC
Operating system: Windows 10.
OXFORD Plasmalab 80 Plus is an asher and etcher designed for use in materials research, semiconductor fabrication and chip production. Its advanced design and construction make it capable of producing extremely accurate, critically precise etch and asher results. Plasmalab 80 Plus is constructed from the highest quality stainless steel, ensuring not only the most durable, reliable performance available but also exceptional spill and overflow resistance. This etcher / asher is fitted with advanced electronic controls and features a digital display to interact with. It utilises a single-stage high vacuum mechanical pumping system with a self-contained safety test system, as well as superior temperature stability. Additional features include an adjustable chamber pressure range and a built-in high-performance RF generator with a wide operating range (up to 350W). OXFORD Plasmalab 80 Plus is equipped with a state-of-the-art system of gas mixers and heaters which can be set to a specific ratio and flow rate, depending on the precise requirements of the job. It is also capable of precision multi-layer etching and ashing, with a repeatable etch rate of 0.1 um/min. The flexible process control allows for optimization to enable precise, high-quality results with minimal cycle times and maximum throughput. Thanks to its advanced design, Plasmalab 80 Plus is very easy to operate. Its user-friendly interface is designed to be intuitive and straightforward, allowing for quick and easy setup and adjustment. All processes are highly automated and feature several advanced safety features, guaranteeing an optimised, safe and productive process. In addition to its excellent etching and ashing capabilities, OXFORD Plasmalab 80 Plus is also ideal for wafer cleaning and debonding. Its advanced design and construction make it especially suitable for fab-grade semiconductor production. This etcher / asher has a very low maintenance time and a high level of reliability. Plasmalab 80 Plus is made from quality materials, meaning its high performance is sure to last for many years with minimum maintenance or repair.
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