Used OXFORD Plasmalab 80 Plus #293766036 for sale
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OXFORD Plasmalab 80 Plus is an advanced etcher/ asher equipment that offers a host of precision etching, ashing and descumming capabilities for a wide range of samples. The etching and ashing capabilities are driven by its integrated pulsed power source which delivers pulses of up to 800V, allowing the system to execute a range of annealing and etching techniques. Furthermore, Plasmalab 80 Plus is equipped with a programmable automatic sample transfer unit and a robotic wafer handling arm for efficient sample handling. OXFORD Plasmalab 80 Plus features a versatile process chamber that offers both batch and single-wafer processing capabilities. The process chamber can accommodate up to 6 wafers for batch processing and also features a built-in mass flow controller and adjustable focus gas interface which regulates the flow of process gases and other gaseous materials into the chamber, allowing for repeatable and reproducible processing results. Additionally, a nitrogen purge machine keeps the process chamber clean and free of impurities, ensuring process integrity. In addition to its advanced etching and annealing capabilities, Plasmalab 80 Plus also offers advanced descumming processes. The advanced descumming processes utilizes a combination of RF power, reactive-ion-etching (RIE), and wet-etching to create a clean etched surface. This process provides superior etching accuracy and uniform metal layer etching results. OXFORD Plasmalab 80 Plus is capable of executing a wide range of etching recipes that can be tailored to the specific etching needs of a particular application. An intuitive user interface allows for easy recipe programming and data logging of etching cycle results for easy reference. Finally, the advanced safety features of Plasmalab 80 Plus makes it a safe and secure etching tool for use in a lab or industrial environments. The asset features several safety features such as advanced alarms, active surge protection, grounded shielding, and over-voltage protection which help to protect both personnel and the model from potential hazards associated with the etching process. In conclusion, OXFORD Plasmalab 80 Plus is an advanced etcher/ asher equipment which provides a host of precision etching, ashing, and descumming capabilities for a wide range of samples. The system is built with advanced safety features, enabling reliable etching in laboratory and industrial environments. With its versatile process chamber and intuitive user interface, Plasmalab 80 Plus offers repeatable and reproducible etching results and can accommodate a wide range of etching recipes customized to specific applications.
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