Used OXFORD Plasmalab 80 Plus #293769424 for sale
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ID: 293769424
Wafer Size: 8"
Reactive Ion Etcher (RIE), 8"
Electrode: 240 mm
Gases: Ar, CF4, O2, CHF3, SF6, He
Gas flow: 100 SCCM
Process pressure: 30–100m Torr
Pumping system: Turbo molecular pump with rotary pump
RF Generator with power supply: 300 W, 13.56 MHz.
OXFORD Plasmalab 80 Plus is a precision etcher/asher that is commonly used in laboratories and industrial environments. This piece of equipment is renowned for its accuracy and reliability as it offers great value for money and is built with high-quality components that allow it to perform its tasks with total precision. Plasmalab 80 Plus consists of a box containing the main board, power supply and the RF generator, a cooling equipment, the plasma chamber and three temperature probes, an inert gas delivery system, the pressure control valve, graphs, display and controller and vacuum pump. This equipment is capable of working with a wide range of substrates and materials, such as stainless steel, aluminium alloys, and even composites, making it suitable for many applications. OXFORD Plasmalab 80 Plus is also known for its low energy consumption, making it a great choice for facility energy efficiency. This etcher/asher is designed to be highly user-friendly, with an intuitive interface for quick setup and operation. This equipment is also capable of remote operation, allowing users to control it from a computer. Plasmalab 80 Plus etcher/asher works by emitting an electrical current inside the chamber to create a plasma atmosphere that etches or ashers the substrate as desired. This unit is further equipped with a pressure control valve to ensure a constant flow of gases through the chamber in order to maintain the plasma. Furthermore, a cooling machine prevents the tool from overheating and ensures optimal performance. This etcher/asher is well-suited for a broad range of substrates and materials due to the high precision capabilities and adjustable plasma parameters. This allows users to customize the asset to match their specific requirements. Moreover, OXFORD Plasmalab 80 Plus also includes multiple safety mechanisms, further ensuring accurate and reliable results without compromising user safety. Overall, Plasmalab 80 Plus is a great piece of equipment for various etching and ashing operations. It is designed for maximum safety, efficiency and accuracy, allowing users to achieve precise results everytime. With its intuitive interface and remote operation capabilities, this etcher/asher is the perfect choice for laboratories, industrial environments and more.
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