Used OXFORD Plasmalab 80 Plus #9226670 for sale

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ID: 9226670
Reactive Ion Etcher (RIE) Gases: Helium and Oxygen No gas box Vacuum pump Spare parts.
OXFORD Plasmalab 80 Plus is a sophisticated plasma etching equipment used for rapid prototyping and small-scale production application of precision components. Designed for accurate and repeatable etching of form and circuitry on a range of substrate materials including metals, polymers, composites, and dielectrics, Plasmalab 80 Plus delivers precise and consistent results. OXFORD Plasmalab 80 Plus features a vacuum chamber which allows the etching process to occur in a pressurized environment. It also incorporates a two-stage turbo pump system with an output of up to 1000 liters per second, ensuring the best etching results by producing the correct pressure and gas flow during the process. The unit features a Multi-level gas delivery machine with four separately controllable gas lines for consistent and accurate pressure control, enabling precision etching of fine details. This tool includes a charge-neutralized cathodic protection asset which employs an ion source injector to help maintain a safe etching environment. The backside of the substrate is counterbias ground with a variable DC power supply allowing for control of both the plasma etch rate and the etch depth. Plasmalab 80 Plus integrates OXFORD Instruments' In-process Monitoring and Control model for accurate and detailed process control. This equipment allows for automatic current control, sputtering deposition rates, chamber pressure, and plasma monitoring with overcurrent protection. The system also features automated substrate indexing, allowing for rapid substrate loading and unloading with an automated labelling function. OXFORD Plasmalab 80 Plus also facilitates contactless sample loading/unloading, with a easy-access cassette unit for the movement of up to eight substrates per cassette. The machine also offers high-precision vertical fine-step positioning and max travel range of 200mm x 200mm, ideal for controlling fine pattern etching. In short, Plasmalab 80 Plus is a highly advanced, multi-functional etching platform, allowing for accurate and repeatable etching of delicate circuitry on a range of materials. This, combined with its automated user-friendly controls and safety features, makes it an ideal solution for numerous research, prototyping, and production-level applications.
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