Used OXFORD Plasmalab 80 Plus #9352269 for sale
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ID: 9352269
PECVD System
With THERMO NESLAB RTE-7 Chiller
MKS MFC's Flow rates range: 50 SCCM to 1 SLM
Deposition material: SiN/SiO2 and SiON
ALCATEL Pump
LAFERT Trolley
HONEYWELL Q Mate Power supply
HONEYWELL UDC3300 Power supply
Power: 90-250 VAC, 50/60 Hz, 18 VA
Gas / Flow rate
CF4+O2 / 200 SCCM
N2 / 1 SLM
SiH4 (2%) / N2 / 500 SCCM
NH3 / 50 SCCM
N2O / 1 SLM.
OXFORD Plasmalab 80 Plus is an advanced full-feature etcher / asher. It is designed to provide accurate, repeatable results when etching and ashing a wide variety of materials. It features an intuitive, user-friendly interface and advanced software that gives you full control over parameters such as power, temperature, and process time. The 80 Plus has multiple chamber configurations to accommodate different processes and materials. Plasmalab 80 Plus has a robust and reliable etching and ashing equipment. It is capable of processing a variety of materials, including brass, copper, aluminum, stainless steel, and PCBs. The 80 Plus utilizes two independent vacuum systems - one for the etch/ash chamber and one for the vacuum system. This ensures maximum process accuracy and repeatability. The vacuum unit includes an oil-free turbomolecular pump, a mechanical backing pump, and a VAR (vacuum assisted re-pumping) station to maintain a stable vacuum level. The chamber is pressurized with argon and offers a range of pressures from 10 mbar to 500 mbar. OXFORD Plasmalab 80 Plus is an extremely accurate etching and ashing machine. Its operating temperature ranges from 270°C to 350°C, while the adjustable pressure and vacuum levels give you exact control over the etching and ashing processes. Its variable-power laser actually allows you to control the depth of etching, as well as the rate of deposition, for unmatched precision. In addition to its advanced etching and ashing features, Plasmalab 80 Plus also provides you with sophisticated diagnostic capabilities. The tool's in-situ software monitors all aspects of the process, including the chamber pressure, temperature, and vacuum, as well as the auxiliary asset status. This allows you to identify and resolve issues before they become a problem. With its industry-leading features and accuracy, OXFORD Plasmalab 80 Plus is an excellent choice for etching and ashing a wide variety of materials quickly and reliably. Its advanced software, powerful motor model, user-friendly interface, and versatile chamber configurations make it a reliable, high-performance machine.
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