Used OXFORD Plasmalab 80 Plus #9383858 for sale

ID: 9383858
Reactive Ion Etcher (RIE) / PECVD Systems, parts system.
OXFORD Plasmalab 80 Plus is an advanced etcher/asher equipment capable of producing highly precise parts and components from a variety of materials. The device is capable of producing parts with amazing accuracy and repeatability. Plasmalab 80 Plus uses a built-in plasma source to deliver precise etching and ashing operations with speeds up to 5 cm2/minute. The system features a robust, high-precision motion stage which ensures accurate manipulation of components, even on the smallest scale. Along with the plasma source, the unit utilizes an embedded and integrated software suite to achieve precise control over the process. OXFORD Plasmalab 80 Plus features a stainless steel, air-cooled chamber with a pressure of 180-300 mTorr. This ensures the machine is able to operate and maintain a consistent process pressure and temperature. The tool utilizes a 3-axis motion control asset to ensure optimal part tracking, with abilities to precisely adjust the etching rate and duration. Other noteworthy features include an integrated set of nozzle-based etching and ashing nozzles combined with a needle vaporization module for submerged component etching. Plasmalab 80 Plus also offers several process options including reactive ion etching, ion beam etching, and ion milling. It also offers a comprehensive overview of options for materials used in etching and ashing operations. The model includes several safety features to ensure the operator is protected against any hazardous conditions. These features include a computerized diagnostics equipment which constantly monitors the system, an interlock unit to further reduce the risk of user injury, and an emergency machine to immediately shut the tool down in the case of an emergency. In addition to its advanced features, OXFORD Plasmalab 80 Plus is designed for easy maintenance. It has a fully automated maintenance asset which allows the model to be preprogrammed to conduct maintenance practices on specified intervals, ensuring that the equipment is kept in top running condition at all times. Overall, Plasmalab 80 Plus is an advanced etcher/asher system capable of producing precise parts and components. It has a number of advanced features and safety systems built into it, making it a great choice for any etching or ashing operation.
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